ࡱ>  @ R?bjbj000pRbRb(   (((8J(,v(<Pb))4)))9+9+9+IIII^ILP$RRiT*PE ++"9+++*P))%oPw/w/w/+8) )Iw/+Iw/w/@ B)) )V$(-.bABP0PxA6U-GU,BDb,U#U$ B<9+M+w/[+ g+X9+9+9+*P*P%(a/(95x[t^^[W- g+g 06/21/07 x[_ Y T N0 (W NR[Ra(uBf_j iTO(u[W-vˊSb( NiTvˊSb(0(10%)  zb_jSSxe-[0  .~w"uTx|vBf0  9eU z"uQs0  cf]\ONT }0  R{tnj |q}0 N0OdSW VT{ NROUL (15%) W-N N҉b_Nh___________ W-NVeb_Nh___________ Pure Error 1u^pY\ __________ *gޞxKNVP[pUO___________ goWKNVP[pUO___________ N0ˊ[b Nh(20%) SourceSum of SquaresDFMean SquaresF ValueWafer Position844.693Error12Total1080.94Std. Dev.R-SquaredMean137.94Adj R-Squared0.7268C.V.3.22Pred R-Squared0.6114PRESS420.00Adeq Precision7.212 NhKN[WpVariance model(uN{ N Twafer positions \vfWUniformityKNq_ GR Estimate the variability due to wafer positions. Estimate the random error component. How much of the total variability in the uniformity response is due to the difference between positions? V0O NhKN[WVT{ NROUL0(25%) VP[ABIII--43+-79-+15++42 ˊ{@b gVP[v\O(uˊRQ_P[ 0(10%) ˊRgN Nnje(^ANOVA Table, a = 0.1)&N NP}֊0(10%) [ NVxke z_0(5%)   (,26@BDFLt  Ⱦȴȭߤȭwh[6PJ]h[6PJo("jh[CJPJUmHnHuh[5PJo(h[PJ\o( h[6PJ jh[PJo( jh[PJo( h[PJo( h[5PJh[>*CJPJ h[PJh[CJPJhZCJPJo(h[CJPJo(+DF $ B ^ |  T ~ 'Ԏ'|'Ԏ'|'|''''''x'|''''''|'|'|'|'| & FGd^G` dG$^` dG$^`  ^` ??? ( * H T V Z ` n r z   * 2 6 T ` d p |   *  *,.8:<Bhrֽ h[PJo( hNGPJo( h[PJh[6PJ]o(h[OJPJo( h[PJo( h!3PJo( h[PJh[5>*PJ\h[5>*PJ\o(E  ( * H V Z \ ^ Z|h|=|t|W|v|Z|h|=|t|W|kd$$IfrV l 'u64 a $$Ifa$ ^ ` l n t v x |vZ|vh|v=|vt|vW| $$Ifa$kd$$IfrV l 'u64 ax z |yZ|ph|p=|pt|pW| $$Ifa$$Ifkd$$IfrV l 'u64 a |yZ|yh|y=|yt|yW|$Ifkd$$IfrV l 'u64 a |yZ|yh|y=|yt|yW|$Ifkd$$IfrV l 'u64 a   |yZ|ph|y=|yt|pW| $$Ifa$$Ifkd$$IfrV l 'u64 a * 4 6 T b |yZ|ph|y=|yt|pW| $$Ifa$$Ifkd$$IfrV l 'u64 ab d p ~ |yZ|ph|y=|yt|pW| $$Ifa$$Ifkdf$$IfrV l 'u64 a * |q'xq'l'|f'|l'|d'|l'|Z'|  ^` ^ & FdG$^`kd&$$IfrV l 'u64 a '|u6x6x6x6xokd$$If40 b04 af4 $d$Ifa$ xYD2^` lx`6x`6x`6x`6x $d$Ifa$kd$$If\ bnnnn04 a  lx`6x`6x`6x`6x $d$Ifa$kd $$If\ bnnnn04 a"&*.lx`6x`6x`6x`6x $d$Ifa$kd $$If\ bnnnn04 a.048<@lx`6x`6x`6x`6x $d$Ifa$kd $$If\ bnnnn04 a@BDtlxb'|]'|]'|]'|['|['|['|['|['| & F  ^` kd $$If\ bnnnn04 a r:::4:8:::>:@:V:f:h:l:x:|:::::::::::::::::::::::; ;;; ;$;,;8;<;F;R;V;`;l;¼ hPJo( h ^PJo( h ^PJh ^CJPJh[6PJ]h[6PJ]o(h[OJPJo(Uh[OJPJQJ h[PJ h[PJo(D:::: : ::::::@:V:Z:^:'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|'|Lxx $d$G$Ifa$ xYD2^` N0O NhKN[WVT{ NROUL0(20%) Run NumberABCY1---222+--323-+-354++-555--+446+-+407-++608+++39900038100004211000391200040dkpUO.z[W(5%) O(uDesign ExpertRgN Nnje RQRg[KNANOVAh &N NP}֊S[Qg_vxke z_0(10%) fk]:eP}g0(5%) mQ0gSx[ zKN"uQsSd\On^SXRKNq_ Nhpvܕ[WKNP}g0(20%) Temperature ((C)Pressure (psig)20021523015090.590.290.290.790.490.416090.690.189.990.590.390.117090.990.790.390.790.690.1O(uDesign ExpertRgN Nnje RQRg[KNANOVAh &N NP}֊0(10%) Under what conditions would you operate this process0(5%) Fit an appropriate model to provide guidance concerning operating conditions for the process. (5%) PAGE  PAGE 4/ NUMPAGES 4  ^:b:f:h:l:p:t:x:~:xxlxxxxxxkd $$IfrnI $64 a $d$G$Ifa$~:::::::zxlxlxlxlxlx $d$G$Ifa$kd|$$IfrnI $64 a:::::::zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 a:::::::zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 a:::::::zxlxlxlxlxlx $d$G$Ifa$kd"$$IfrnI $64 a:::::::zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 a:::;;;;zxlxlxlxlxlx $d$G$Ifa$kd2$$IfrnI $64 a;;;;; ;&;zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 a&;(;,;0;4;8;>;zxlxlxlxlxlx $d$G$Ifa$kdB$$IfrnI $64 a>;@;F;J;N;R;X;zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 aX;Z;`;d;h;l;r;zxlxlxlxlxlx $d$G$Ifa$kdR$$IfrnI $64 al;p;z;;;;;;;; <<*<X<Z<\<<<<<<<<<<<<<<==== ="=(=*=,=6=8=:=@=B=D=J=L=N=T=V=Z=b=h=j=l=r=t=v=|=~====޼ްީީީީީީީީh[56PJ\]o( h8JPJo(h[56PJ\] jh[PJh[6PJ]o(h[6PJ] h8JPJ h[PJ h[PJo( h ^PJ h ^PJo( hPJo(=r;t;z;~;;;;zxlxlxlxlxlx $d$G$Ifa$kd$$IfrnI $64 a;;;<4<6<8<:<<<><@<B<D<F<zxu'|u'|u'|s'|s'|s'|s'|s'|s'|s'|s'|s'| & Fkdb$$IfrnI $64 a F<H<J<L<N<P<R<T<V<X<\<<<<<<<<=='|'|'|'|'|'|'|'|'|'|'||r|||||Jkd$$If40S LN64 aof4 $$Ifa$$If==="=,=6=||||| $$Ifa$$Ifpkd$$If4\S hL N64 aof46=8=:=D=N=X=||||| $$Ifa$$IfmkdX$$If\S hLN64 aoX=Z=b=l=v==||||| $$Ifa$$Ifmkd$$If\S hLN64 ao======||||| $$Ifa$$Ifmkd$$If\S hLN64 ao=========================>>>>?????????????????????????˼˼jh8JUh[hUT0JmHnHuh8J h8J0Jjh8J0JUh[56PJ\] h[PJ h[PJo( h8JPJo(4======||||| $$Ifa$$Ifmkd:$$If\S hLN64 ao======||||| $$Ifa$$Ifmkd$$If\S hLN64 ao==J>>?????????|'||'||'|z'|z'|qkzq|k'|zh]h&`#$ & F & FGxXD2^G`mkdr$$If\S hLN64 ao ??????8 '|. 00 . A!5"#$%S7 $$If!vh555u55#v#v#vu#v#v:V 6555u55/ 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/  / / / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ / / / / / / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ / / / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ / / / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ / /  / / / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ / 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u55/ 44 a$$If!vh555u55#v#v#vu#v#v:V 6555u5544 a$$If!vh55#v:V 405/ / / / / 44 af4$$If!vh5n5n5n5n#vn:V 05n/ / / / / 44 a$$If!vh5n5n5n5n#vn:V 05n/ /  /  / / /  /  / 44 a$$If!vh5n5n5n5n#vn:V 05n/  / / / /  / / / 44 a$$If!vh5n5n5n5n#vn:V 05n/  / / / /  / / / 44 a$$If!vh5n5n5n5n#vn:V 05n/  / / /  /  / / /  44 a$$If!vh55555#v#v:V 655/ 44 a$$If!vh55555#v#v:V 655/ 44 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 65544 a$$If!vh55555#v#v:V 655/ 44 a$$Ifo!vh5N5#vN#v:V 46+,5N5/ / 44 aof4$$Ifo!vh5N555#vN#v#v#v:V 46+5N555/ / 44 aof4$$Ifo!vh5N555#vN#v#v#v:V 65N555/ 44 ao$$Ifo!vh5N555#vN#v#v#v:V 65N55544 ao$$Ifo!vh5N555#vN#v#v#v:V 65N55544 ao$$Ifo!vh5N555#vN#v#v#v:V 65N55544 ao$$Ifo!vh5N555#vN#v#v#v:V 65N55544 ao$$Ifo!vh5N555#vN#v#v#v:V 65N555/ 44 aoDd LL0  # A2'}QȢaТur``!j'}QȢaТuVB778xZ pTE7dIBCH8$OPR*ZK Ѭ`I-V ]- *+.VT,QX""X'e/73|Ԫ{ݧ~H"邞B$l?nJ.5w-n=/(LąhuL+=}e+.m , zFa=+: DM^L3D@,4 Mq', (sY.;`Ypca`XeG"]"TĩmSho9P ]p(bm; , Ti}aֳ3`X806-<n [w,`$ˣ}`㵮Ԙ7(2-b[؍u_*|B\Rm ~ꌒ)7V[ \Վ8Z.6Fƈi[%r=uGUC~])FBN6smBA u>ٖJ]SXM|?"cOx`~з>`}c0У~f)4L̫LIPk"SVh+3Ό }qUc|:*+tN@G*}Nʐsɩ9)(Տaz}΅mU_OGȩrI;C|-&ՎߥNSiH8$1g[S?A[ig8k.릾V^w\+; \Fru-3_WZ,3ze{>:ُ 0tbr==\Ujݺ3{&QvpOHafRKGJlE7N"l%!vOp݆94 kJtL `9`92j߾cXs +_= zF8/=CꙢ!匿2B2>Ev}0~=31?{1{1}1~G_e1~ 0~!pg|_e|6G_w0~_fˌ_w2ub|//0/fb=g0+p I_ =V`Yù0Xuf }:a#yɌ2{1`v}_5oe|+g3~6bUb|γۮ&fy!8Əc| Kd̵*Ưb/` ?Ouw I_W0~QB2~oΣ+͌of|5g?~/b"Əag2>.[%NW\Su>6Ro½ \k9d- j1<^WnU;֪p啍cVa*K(T· ϼ+G]R3~Lq1|>/ɴ0.P{Y{(GylmSM~>muŝ4oCDMIҏ3Zr=ÃpG[c%5*x4sXb#vۿOqrTCσ3v̬zP]pC8 E^{ɐCLʜzF/΄Sb]wq椉Cfy 3Gax fMxN/gjs̾L4\SWW;yV3jsS֕Vn,Xa%v^Y0y FoQүt`EG-iE[t_CE5x ,7-&*BKˣs\O~qo~_lg}Uu&QT7|RE)8 xwŠE} 9ĽNqGmqqOQSQqʸq(nYTܣ*<:^7*7ġ0ŅnSqQ\]T܍*":jF!q(_J,|#,\r!,@Xu%,l²" a]$, 2K',0?a~K#,T|K!,0/a^sUa< aʁPqŽa?#a?vc%(auv#&0a;DAa?=aaNX;a a'k¾&+¾"laK^¾$K¾ >#3O ݄&laIN>&c>"#>$C> ¶ {0}mQV¶-m&l3aD;CۄM[E6aou {[G:W{{Մ&yž'la{g^=Iؓ=NㄵFr– [JRZ k%l1a {tM݄E]#lav;a{]C5w.ְwK]NwDvC?zt=kG[l*PJ$A@$ -k=W[WFi@F h\  9r CJ)@ x0@0   9r CJ p ++++W -"#YZ *?TUVWXfm|*128?@OUVWVWlorsuwy|}    +-/13468:<?@BDFHKLNPRTWXZ\^`cdfhjloprtvx{|~  !"#$%&'()*+,.VXiyz{%_000000000000 0 0 0 0 0000000 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 00 00 00 000 0 0 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 0 0 0 0 00 0 0 0 0 00000000000000000@0 @0 @0 0 0 0 @0 @0 @0 00 0 @0 @0 @0 00 0 @0 @0 @0 0 0 0 @0 @0 @0 0 0 0 @0 @0 @0 0 0 0 @0 @0 @0 0 0 0 @0 @0 @0 0 0 0 @0 @0 @0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0  0 0 00000000000000000000000 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0   0 000@00}@00}@00}00@00@000H@00@00 '''* rl;=? +3 ^ x  b  .@^:~::::::;&;>;X;r;;F<=6=X=====??  !"#$%&'()*,-./0124567?  !#*!!T8@z(  B    B S  ?t7&t&f>*urn:schemas-microsoft-com:office:smarttags PersonName #%@BZ\]rsz{|?HX`@DX_mslnoq .PYZ z:>*28@OX+1PX{Z^Z288M%fȮ`0bLBLlzZ.S4 q!Zex=b=>m)|h` HH^H`o(. ^` 0 ^` . ^` .`  ` ^` ` 0@  @ ^@ ` .   ^ ` . ^` 0 ^` .HH^H`o(0 ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .HH^H`o(. ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .HH^H`o(0 ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .HH^H`o(. ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .M^`Mo(()((^(`o(. ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .^`o(. ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .HH^H`o(. ^` 0 ^` .`  ` ^` ` .@  @ ^@ ` 0   ^ ` . ^` . ^` 0 ^` .88M%LBLq!ZZ.S`0)|=bc        V        E@S                蔜        4|ryT       tP        c         Z!38JUT[|cNG ^Xfm|*128?@OUVlorsuwy|} +-/13468:<?@BDFHKLNPRTWXZ\^`cdfhjloprtvx{|~Xiyz{@\\http://163.17.12.17\NPI543BD8Ne02:HP LaserJet 5000 Series PCLHP LaserJet 5000 Series PCL\\http://163.17.12.17\NPI543BD4C 4dXXA4 DINU"4= \\http://163.17.12.17\NPI543BD4C 4dXXA4 DINU"4=  |@ :UnknownG: Times New Roman5Symbol3& : Arial/E .jwiԚ;5^-NwiԚ0}fԚ?5 .0}fԚMingLiU qh fff   $<!),.:;?]}    % & ' 2 t%00 0 0 00000013468:<>@BDOPQRTUVWZ\^ \]([{  5 0 0 00000579;=?ACY[][5xx2d 3QH(?['85x[t^^ {txex[(2A & 2B) ,{N!k\ 85. 10. 8.Ng__Horng-Chyi Horng6* i Z'`IZ',        Oh+'0  (4 P \ h t485Ǧ~ ޲zƾ(2A & 2B) Ĥ@p 85. 10. 8.өNormalHorng-Chyi Horng10Microsoft Word 10.0@캃@hh@p@hh՜.+,0 X`px CYUT    !"#$%&'()*+,-./012345678:;<=>?@ABCDEFGHIJKLMNPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxy{|}~Root Entry Fd$Data 9F*1TableOsUWordDocument0pSummaryInformation(zDocumentSummaryInformation8CompObjf  FMicrosoft Word MSWordDocWord.Document.89q